<?xml version="1.0"?>
<feed xmlns="http://www.w3.org/2005/Atom" xml:lang="en-GB">
	<id>https://www.vigyanwiki.in/index.php?action=history&amp;feed=atom&amp;title=Template%3AMicrotechnology</id>
	<title>Template:Microtechnology - Revision history</title>
	<link rel="self" type="application/atom+xml" href="https://www.vigyanwiki.in/index.php?action=history&amp;feed=atom&amp;title=Template%3AMicrotechnology"/>
	<link rel="alternate" type="text/html" href="https://www.vigyanwiki.in/index.php?title=Template:Microtechnology&amp;action=history"/>
	<updated>2026-07-11T15:09:14Z</updated>
	<subtitle>Revision history for this page on the wiki</subtitle>
	<generator>MediaWiki 1.39.3</generator>
	<entry>
		<id>https://www.vigyanwiki.in/index.php?title=Template:Microtechnology&amp;diff=16951&amp;oldid=prev</id>
		<title>Admin: 1 revision imported from :alpha:Template:Microtechnology</title>
		<link rel="alternate" type="text/html" href="https://www.vigyanwiki.in/index.php?title=Template:Microtechnology&amp;diff=16951&amp;oldid=prev"/>
		<updated>2022-10-11T11:16:36Z</updated>

		<summary type="html">&lt;p&gt;1 revision imported from &lt;a href=&quot;https://alpha.indicwiki.in/index.php?title=Template:Microtechnology&quot; class=&quot;extiw&quot; title=&quot;alpha:Template:Microtechnology&quot;&gt;alpha:Template:Microtechnology&lt;/a&gt;&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en-GB&quot;&gt;
				&lt;td colspan=&quot;1&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;1&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 16:46, 11 October 2022&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-notice&quot; lang=&quot;en-GB&quot;&gt;&lt;div class=&quot;mw-diff-empty&quot;&gt;(No difference)&lt;/div&gt;
&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</summary>
		<author><name>Admin</name></author>
	</entry>
	<entry>
		<id>https://www.vigyanwiki.in/index.php?title=Template:Microtechnology&amp;diff=16950&amp;oldid=prev</id>
		<title>alpha&gt;Indicwiki: Created page with &quot;{{Navbox |name   = Microtechnology |title  = Microtechnology |bodyclass = hlist  |above  =  * Microelectromechanical systems * Microtechnology * Micromachinery...&quot;</title>
		<link rel="alternate" type="text/html" href="https://www.vigyanwiki.in/index.php?title=Template:Microtechnology&amp;diff=16950&amp;oldid=prev"/>
		<updated>2022-07-12T05:11:17Z</updated>

		<summary type="html">&lt;p&gt;Created page with &amp;quot;{{Navbox |name   = Microtechnology |title  = &lt;a href=&quot;/index.php?title=Microtechnology&amp;amp;action=edit&amp;amp;redlink=1&quot; class=&quot;new&quot; title=&quot;Microtechnology (page does not exist)&quot;&gt;Microtechnology&lt;/a&gt; |bodyclass = hlist  |above  =  * &lt;a href=&quot;/index.php?title=Microelectromechanical_systems&amp;amp;action=edit&amp;amp;redlink=1&quot; class=&quot;new&quot; title=&quot;Microelectromechanical systems (page does not exist)&quot;&gt;Microelectromechanical systems&lt;/a&gt; * &lt;a href=&quot;/index.php?title=Microtechnology&amp;amp;action=edit&amp;amp;redlink=1&quot; class=&quot;new&quot; title=&quot;Microtechnology (page does not exist)&quot;&gt;Microtechnology&lt;/a&gt; * &lt;a href=&quot;/index.php?title=Micromachinery&amp;amp;action=edit&amp;amp;redlink=1&quot; class=&quot;new&quot; title=&quot;Micromachinery (page does not exist)&quot;&gt;Micromachinery&lt;/a&gt;...&amp;quot;&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;{{Navbox&lt;br /&gt;
|name   = Microtechnology&lt;br /&gt;
|title  = [[Microtechnology]]&lt;br /&gt;
|bodyclass = hlist&lt;br /&gt;
&lt;br /&gt;
|above  = &lt;br /&gt;
* [[Microelectromechanical systems]]&lt;br /&gt;
* [[Microtechnology]]&lt;br /&gt;
* [[Micromachinery]]&lt;br /&gt;
&lt;br /&gt;
|group1 = Basic structures&lt;br /&gt;
|list1  =&lt;br /&gt;
* [[Interdigital transducer]]&lt;br /&gt;
* [[Cantilever#In microelectromechanical systems|Cantilever]]&lt;br /&gt;
* [[Microchannel_(microtechnology)|Microchannel]]&lt;br /&gt;
&lt;br /&gt;
|group2 = Applications&lt;br /&gt;
|list2  = {{Navbox|subgroup&lt;br /&gt;
 |groupwidth = 7em&lt;br /&gt;
 |group1 = [[Sensor]]s&lt;br /&gt;
 |list1  =&lt;br /&gt;
* [[Microbolometer]]&lt;br /&gt;
 |group2 = [[Actuator]]s&lt;br /&gt;
 |list2  =&lt;br /&gt;
* [[Comb drive]]&lt;br /&gt;
* [[Scratch drive actuator]]&lt;br /&gt;
* [[MEMS thermal actuator|Thermal actuator]]&lt;br /&gt;
 |group3 = [[Switch]]es&lt;br /&gt;
 |list3  =&lt;br /&gt;
* [[Digital micromirror device]]&lt;br /&gt;
* [[Optical switch]]&lt;br /&gt;
 |group4 = Other&lt;br /&gt;
 |list4  =&lt;br /&gt;
* [[Millipede memory]]&lt;br /&gt;
* [[Radio-frequency microelectromechanical system]]s&lt;br /&gt;
* [[Microoptoelectromechanical systems]]&lt;br /&gt;
* [[Microphotonics]]&lt;br /&gt;
* [[Bio-MEMS|Biological microelectromechanical systems]]&lt;br /&gt;
* [[:Category:Microfluidics|Microfluidics]]&lt;br /&gt;
* [[Micropower]]&lt;br /&gt;
 }}&lt;br /&gt;
&lt;br /&gt;
|group3 = Processes&lt;br /&gt;
|list3  = {{Navbox|subgroup&lt;br /&gt;
 |groupwidth = 7em&lt;br /&gt;
 |group1 = General&lt;br /&gt;
 |list1  =&lt;br /&gt;
* [[Surface micromachining]]&lt;br /&gt;
* [[Bulk micromachining]]&lt;br /&gt;
* [[Microelectromechanical_systems#High_aspect_ratio_(HAR)_micromachining|HAR micromachining]]&lt;br /&gt;
* [[:Category:Thin film deposition|Deposition]]&lt;br /&gt;
* [[:Category:Lithography (microfabrication)|Lithography]]&lt;br /&gt;
* [[:Category:Etching (microfabrication)|Etching]]&lt;br /&gt;
* [[Wire bonding]]&lt;br /&gt;
 |group2 = Specific&lt;br /&gt;
 |list2  =&lt;br /&gt;
* [[LOCOS]]&lt;br /&gt;
* [[Shallow trench isolation]]&lt;br /&gt;
* [[LIGA]]&lt;br /&gt;
* [[Lift-off (microtechnology)|Lift-off]]&lt;br /&gt;
* [[Photolithography]]&lt;br /&gt;
* [[Silicon on insulator]]&lt;br /&gt;
* [[Smart cut]]&lt;br /&gt;
 }}&lt;br /&gt;
}}&amp;lt;noinclude&amp;gt;&lt;br /&gt;
{{DEFAULTSORT:Microtechnology}}&lt;br /&gt;
[[Category:Technology and applied science templates]]&lt;br /&gt;
&amp;lt;/noinclude&amp;gt;&lt;/div&gt;</summary>
		<author><name>alpha&gt;Indicwiki</name></author>
	</entry>
</feed>